Solving the problem of plasma wall interaction is important for developing the fusion reactor. One of the problems involved with this interaction is plasma driven permeation (PDP), the phenomenon of large hydrogen permeation by plasma. This report focuses on previous studies of PDP, and reviews the abstracts of many experimental and theoretical works regarding PDP. In addition, this report introduces our original work on low temperature plasma driven permeation. In our work, ECR and RF heating plasma devices and various kinds of metal membranes were employed. Also researched were the dependencies of membrane thickness, temperature, and surface conditions on PDP. The incident hydrogen flux rate, which is little known in PDP experiments using a plasma discharging device, was estimated by calculating plasma composition. The mechanism of low temperature PDP was investigated and shown conceptually.