Journal of Plasma and Fusion Research
Print ISSN : 0918-7928
Special Topic Article : Present Status and Future of EUV (Extreme Ultra Violet) Light Source Research
Present Status and Future of EUV (Extreme Ultra Violet) Light Source Research 4.Laser Produced Plasma Light Sources 4.1Present Status of Laser Produced Plasma EUV Sources Development
Toshihisa TOMIE
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Keywords: EUVL source, laser-produced plasma, tin, cavity-confinement, spectral efficiency, plasma shield
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2003 Volume 79 Issue 3 Pages 234-239

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Abstract
The present status of the development of laser-produced plasma EUV sources throughout the world is summarized. The year 2002 will be remembered as a turning point when target material shifts from xenon to tin for high conversion efficiency. Research on the EUVL source taking place at the AIST is also briefly described.
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© 2003 by The Japan Society of Plasma Science and Nuclear Fusion Research
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