Journal of Smart Processing
Online ISSN : 2187-1337
Print ISSN : 2186-702X
ISSN-L : 2186-702X
High-concentration Rare Earth Ion Doping to Si Using Reconstructed Surface Structure
Yusuke MIYATA, Yoshitaka OKUYAMA, Norifumi FUJIMURA
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Keywords: Rare Earth Doping, Silicon, Molecular Beam Epitaxy, Reconstructed Surface Structure
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2013 Volume 2 Issue 5 Pages 219-223

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© 2013 Smart Processing Society for Materials, Environment & Energy
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