Hyomen Kagaku
Online ISSN : 1881-4743
Print ISSN : 0388-5321
ISSN-L : 0388-5321
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Study of the Surface Morphology of Titanium Oxide Films Epitaxially Grown on MgO(100) by Non-contact AFM
Toshitaka KUBOHisakazu NOZOYE
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2000 Volume 21 Issue 7 Pages 405-412

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Abstract
The surface morphology of very thin titanium oxide films grown on MgO(100) was studied by use of non-contact atomic force microscopy (AFM). When Ti was deposited, in an O2 atmosphere of 2.6×10-6 Pa, on MgO(100) maintained at 600oC, rectangular structures of spinel nano-crystals were observed. Solid state reactions simultaneously occur during film deposition. When the surface was heated at 900oC in an O2 atmosphere of 2.6×10-6 Pa, a long range stripe structure was observed. The structure is related to the modulated structure characteristics of the Mg2TiO4(100) surface. A titanium oxide-MgO interfacial reaction proceeded by prolonged annealing. The stripe structure disappeared and atomically flat terraces with a step height of 0.2 nm were observed.
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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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