Abstract
We have been developing photoemission electron microscopy (PEEM) using both soft and hard X-rays at SPring-8 beamline BL 15 XU, in order to realize two-dimensional chemical analysis for commercial materials. In order to clarify the sub-surface of specimens, high kinetic energy photoelectrons are appropriate owing to their longer inelastic mean free path. Low kinetic energy photoelectrons, such as secondary electrons, have a high electron yield so that one can easily adjust the PEEM lens condition in real-time with a high spatial resolution image and obtain the bulk sensitive information. Therefore, detecting both high energy photoelectrons and low energy secondary electrons is highly desirable for the practical PEEM system. Our PEEM can also observe several materials including thick insulators and rugged specimens. Using our PEEM, we realized a wide energy scan, and successfully observed the energy filtered image using photoelectrons emitted from deep inner shell for the first time. In this paper, we present the performance of our XPEEM and a finding of the micro-area X-ray absorption near-edge structure (μ-XANES) of DVD+RW for a practical material.
