Three Dimensional Scanning Photoelectron Microscope (3D nano-ESCA)

Abstract

We have developed a scanning photoelectron microscope system with the capability of depth profiling in electron spectroscopy for chemical analysis (ESCA). We call this system “3D nano-ESCA.” The system has been installed at the University-of-Tokyo Materials Science Outstation beamline, BL07LSU, at SPring-8. A total spatial resolution is achieved to be better than 70 nm. A photoelectron analyzer with an acceptance angle of 60 degrees enables us to obtain the angular dependence of the photoelectron spectra for the depth-profile analysis without rotating the sample. In this article, we introduce the capability of the 3D nano-ESCA system and recent research activities on high-k gate insulator, graphene, and metal-nanowire devices using the 3D nano-ESCA system.