High-Resolution and High-Sensitivity X-ray Ptychography

Abstract

X-ray ptychography, which is one of the coherent X-ray diffractive imaging techniques, allows us to observe extended objects with a high-spatial resolution and a wide field of view. We have developed high-resolution and high-sensitivity X-ray ptychography using the high-intensity X-ray beam focused by total reflection mirrors at SPring-8. In addition, we have applied it to the elemental mapping of metallic nanoparticles and the imaging of the dislocation strain fields of a silicon film. This method will be available to observe various materials and biological specimen.