Abstract
The geometrical limitations of resolution caused by third-order spherical aberration were overcome with the development of practical aberration correctors. Spherical aberration correctors for probe-forming systems have been widely used in high-resolution structural and analytical studies. The performance of the microscope at medium acceleration voltages was sufficiently improved for resolving the atomic position and performing chemical analysis on an atomic level. We demonstrated that a low voltage microscope had the ability to facilitate atomic-resolution imaging and analytical study.
