Hyomen Kagaku
Online ISSN : 1881-4743
Print ISSN : 0388-5321
ISSN-L : 0388-5321
Simulation of Chemical Vapor Deposition
Modeling of Transport Phenomena and Chemical Reactions
Nobuyuki IMAISHI, Yasunobu AKIYAMA
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1994 Volume 15 Issue 4 Pages 233-239

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[in Japanese]
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© The Surface Science Society of Japan
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