The Present and Future of Nano-Lithography Using Scanning Probes How to Measure the Properties of Nano-Lithographed Structures

Masakazu AONO; Chun-Sheng JIANG; Tomonobu NAKAYAMA; Taichi OKUDA; Shan QIAO; Makoto SAKURAI; Carsten THIRSTRUP; Zang-Hua WU

doi:10.1380/jsssj.19.698

The Present and Future of Nano-Lithography Using Scanning Probes

How to Measure the Properties of Nano-Lithographed Structures

Masakazu AONO, Chun-Sheng JIANG, Tomonobu NAKAYAMA, Taichi OKUDA, Shan QIAO, Makoto SAKURAI, Carsten THIRSTRUP, Zang-Hua WU

Author information

Masakazu AONO
Surface and Interface Laboratory, The Institute of Physical and Chemical Research (RIKEN)
Core Research for Evolutional Science and Technology (CREST) Program, Japan Science and Technology Corporation (JST)
Department of Precision Science and Technology, Osaka University
Chun-Sheng JIANG
Surface and Interface Laboratory, The Institute of Physical and Chemical Research (RIKEN)
Core Research for Evolutional Science and Technology (CREST) Program, Japan Science and Technology Corporation (JST)
Tomonobu NAKAYAMA
Surface and Interface Laboratory, The Institute of Physical and Chemical Research (RIKEN)
Core Research for Evolutional Science and Technology (CREST) Program, Japan Science and Technology Corporation (JST)
Taichi OKUDA
Surface and Interface Laboratory, The Institute of Physical and Chemical Research (RIKEN)
Core Research for Evolutional Science and Technology (CREST) Program, Japan Science and Technology Corporation (JST)
Shan QIAO
Surface and Interface Laboratory, The Institute of Physical and Chemical Research (RIKEN)
Core Research for Evolutional Science and Technology (CREST) Program, Japan Science and Technology Corporation (JST)
Makoto SAKURAI
Surface and Interface Laboratory, The Institute of Physical and Chemical Research (RIKEN)
Core Research for Evolutional Science and Technology (CREST) Program, Japan Science and Technology Corporation (JST)
Carsten THIRSTRUP
Surface and Interface Laboratory, The Institute of Physical and Chemical Research (RIKEN)
Core Research for Evolutional Science and Technology (CREST) Program, Japan Science and Technology Corporation (JST)
Zang-Hua WU
Surface and Interface Laboratory, The Institute of Physical and Chemical Research (RIKEN)
Core Research for Evolutional Science and Technology (CREST) Program, Japan Science and Technology Corporation (JST)

JOURNAL FREE ACCESS

1998 Volume 19 Issue 11 Pages 698-707

DOI https://doi.org/10.1380/jsssj.19.698

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Abstract

About 10 years have passed since the first demonstration of atom manipulation by scanning tunneling microscopy (STM) was made, and it has become possible to fabricate variously designed nanostructures using scanning probe microscopy (SPM's) including STM. If we consider the next 10 years in this field, it will become most important to measure the functional properties of fabricated nano-structures and therefore to develop new methods that make such measurements possible. In this paper, three new methods developed by the authors are described, which are an independently-driven-double-tip STM, a photon-detecting STM, and a spin-polarized STM of a new mode.

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