Abstract
In micro gas flows, some interesting phenomena at/near a wall, velocity slip, temperature jump, and thermal transpiration, play an important role; thus, the development of a measurement technique, which measure a physical quantity at a wall, is very important. The pressure-sensitive paint (PSP) technique has potential as a diagnostic tool for pressure measurement of a solid surface. However, the application of PSP to micro gas flow measurement is very difficult, because the conventional PSP is too thick and does not have sufficient spatial resolution. Pressure-sensitive molecular film (PSMF) with ordered molecular assemblies has been developed. PSMF is fabricated by the Langmuir-Blodgett method. We also developed a micro channel by the PDMS micro-molding technique with mixing a pressure-sensitive dye into PDMS: i.e., a micro channel fabricated by PSP, which is named PSCC. In this paper, we show the PSMF/PSCC fabrication procedure and the applicability of them to micro gas flow measurement.
