Abstract
Particle dispersion and recovery test are often employed in performance testing of clean rooms in order to verify the laminar airflow throughout the work zone and the capability of the clean room to limit the dispersion of, or recover from the effects of internally generated contamination. In these tests commonly used is a smoke tracer method, which inevitably pollutes test objects.
The patterns traced by smoke appear to be closely related to turbulence intensities of the airflow, which can be easily measured together with air velocities. For the purpose of substituting the turbulence intensity measurement for the smoke method, comparative tests in the clean room laminar flow were carried out between the flow visualization by use of a luminous mini-tuft as well as smoke tracers and the turbulence intensity measurement by a hot-wire anemometer. The test results are shown in Fig. 2, 3 and 4 and the substitution seems to be promising.
