流れの可視化
Online ISSN : 1884-0361
Print ISSN : 0287-3605
ISSN-L : 0287-3605
4 X線透過法によるシリコン融液の対流の可視化
柿本 浩一江口 実渡辺 久夫日比谷 孟俊
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1988 年 8 巻 30 号 p. 147-150

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Natural and Forced convection of molten silicon during Czochralski single crystal growth was directly observed using X-ray radiography and solid tracer method. The tracer, whose density and wettability were adjusted to that of molten silicon, was newly developed. Observed flow of natural convection of molten silicon in a crucible was not only steady but also transient, and not axisymmetric but asymmetric.
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