1998 Volume 18 Issue Supplement1 Pages 63-66
In order to improve the measurement accuracy of the successive abandonment method, three sub-pixel analysis methods are examined about their precision and analysis time. Among them, the weighted average method has the lowest precision. And two others, a reflection point method and a shifted template method, have similar precision. Measurement precision is examined by rotating and shifting a solid pattern. As for analysis time, so far, the former method seems to be faster than the latter.