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Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
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Atmospheric Pressure Glow Discharge Plasma in Nitrogen and its Application to Chemical Vapor Deposition
Eiichi SUETOMI, Toshio TSUJI, Kazuhiro FUKUDA, Atsushi SAITO, Koji FUKAZAWA, Akira NISHIWAKI
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2005 Volume 48 Issue 2 Pages 62-66

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© 2005 by The Vacuum Society of Japan
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