Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Reviews
Process Integration for Small-thin Image Sensor Device Used Three-dimensional Chip-stacking Technologies
Mitsuo UMEMOTO, Kojiro KAMEYAMA, Akira SUZUKI, Yoshio OKAYAMA
Author information
JOURNAL FREE ACCESS

2005 Volume 48 Issue 9 Pages 519-523

Details
Download PDF (1213K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© 2005 by The Vacuum Society of Japan
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top