Highly oriented thin film fabricated on an Au(111) substrate has recently been attracting much attention in the field of organic field effect transistor. The Orientation of the dye thin film prepared on the Au(111) substrate is important because the interface between the active layer deposited on the electrode and the electrode is closely related to the carrier injection from the electrode to the active layer. The orientation of VOPc thin film prepared on the Au(111) substrate strongly depends upon the temperature of the Au(111) substrate preheated before the deposition of the VOPc molecule. Part of the VOPc molecules deposited on the Au(111) substrate preheated at 100°C perpendicularly orientate on the Au(111) substrate. On the other hand, many VOPc molecules deposited on the Au(111) substrate preheated at 300°C orientate parallel to the Au(111) substrate.