抄録
We found high-density plasma generated by microwaves propagating along metal surface at a negative voltage against a grounded chamber. Magnetic probe measurement showed that 2.45-GHz microwaves propagated as surface waves that were guided by the interface between the high-density plasma and underdense region in ion sheath surrounding the metal surface. The same phenomenon was demonstrated to occur in a narrow metal tube 7.5 mm in inner diameter, where surface waves were considered to propagate along the interface between a high-density plasma column in the tube and underdense region in ion sheath formed along the inner wall of the tube.
