Abstract
The flux distribution of sputtered particles onto a circular substrate was numerically investigated, considering the ambient gas flow and the gas heating effect induced by sputtered particles. To explore the gas flow and the gas heating effects separetely, two calculation methods were employed, namely the test multi-particle method (TMP) and the direct simulation Monte Carlo method (DSMC). The TMP with a frozen ambient gas flow was found to be suited for calculating the gas flow effect on a sputtered particle much heavier than Ar. For a lighter particle of which mass is comparable with or less than Ar, the DSMC becomes indispensable, because the rarefaction due to the gas heating increased the sputtered flux by 10% compared with that obtained by the TMP.
