Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
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Development of Ceramic Nanocoating by Electron Beam Physical Vapor Deposition
Hideaki MATSUBARA
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2006 Volume 49 Issue 6 Pages 363-367

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© 2006 by The Vacuum Society of Japan
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