2007 年 50 巻 12 号 p. 739-744
Evaluations of mechanical properties of organic polymer thin films are important for enhancement of their functions. Measuring and evaluation methods of these properties, i.e., internal stress, shearing stress, tensile modulus, breaking strength, are presented in this paper.
In addition, adhesion of these thin films to metal substrates is one of the important properties for enhancement of their functions as well as the mechanical properties. Measuring and evaluation methods of adhesion properties are also presented in this paper.