Fabrication of One-dimensional Fresnel Zone Plate for Hard X-ray Focusing

Abstract

  A one-dimensional multilayer Fresnel zone plate (1D-FZP) is capable to be an optical element for the micro X-ray computer tomography imaging with high spatial resolution. We developed the 1D-FZP with sputtered-sliced method. The 1D-FZP composes of high-Z (Cu) layer and low-Z (Al) layer, alternately. In this study, we fabricated the Cu/Al multilayer on a Si substrate at room temperature and 200°C, respectively. The smooth section of both multilayer was observed with scanning electron microscope.