抄録
Carbon nanotube (CNT) has unique field emission (FE) properties. CNT can emit electrons in lower vacuum condition than other field emitters.
Therefore we have investigated its emission properties and developed a small size scanning electron microscope (SEM) equipped with CNT electron emitter that can operate at low extraction voltages at a pressure of 10-3 Pa.
In order to ensure enough stability for SEM operation, we measured the FE current in various partial pressure condition and numerically analyzed power spectral density function of field emission current by a computer.
As a result, we have found it very effective to heat an emitter and metal parts around an emitter.
Finally, we added heating system in a CNT-FE-SEM and succeeded in taking a stable image.
