真空技術
Online ISSN : 1883-7182
ISSN-L : 1883-7182
真空型単結晶製造装置
岩瀬 新午
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ジャーナル フリー

1954 年 5 巻 3 号 p. 236-244

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A vacuum furnace using a molybdenum heater for use in pulling single crystals of germanium from a melt is described. It has a pulling rod with rotation two removable impurity adders a adjusting rod for crucible base and could be observed during the run through windows with shutters.
The vacuum system consisted of a 4″oil diffusion pump of the speed of 100l/sec and a 500l/min mechanical pump and the vacuum higher than 5×10-5mmHg was maintained during operation
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