スパツターリング (飛沫現象) について

抄録

In the beginning of this short survey, the quantitative values of the threshold energies and the sputtering yields under normally incident bombardment by low energy Hg⁺ ions are collected for various metals, without referring to their mechanisms in detail. From these data, the threshold energies have been estimated by Wehner and the measure of the sputtering yields by author for the case of rare gas ions, assuming that the momentum transfer mechanism is applicable for sputtering by low energy ions. The result are also included.
In the case of high energy ions, the sputtering yields under rare gas ion bombardments are calculated for Ag from the equation which is derived by Keywell basing upon a consideration analogous to the neutron cooling process in modulator, but the calculated curves do not fit to the experimental once. It suggest that there is no theoretical expression which can predict the yield value quantitatively.
At last, the depth of penetration of an ion into metal and the changes in apparent sputtering yield with increases in gas pressure are also described briefly.