抄録
A low energy (_??_ 3 keV) rare gas ion scattering system (scattering angle is fixed at θ=90°), which is enclosed in Pyrex glass envelop, is constucted and its characteristic performance are described. In the scattering experiments, helium ion beam having primary energy of 1.5 keV is mainly used, and a lot of scattering experiments have been carried out for varions target materials; which are stainless steel, molybdenum, graphite, nickel and gold or palla dium coated nickel, etc. Based on the experimental results, the imrpovement of the designed scattering system and the applicability of ion backscattering technique for surface study are discussed.
