Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
The Ion Current Characteristics of Cathode Circuit in a rf Ion Plating System
Tsutomu TSUKADA, Naokichi HOSOKAWA
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1975 Volume 18 Issue 11 Pages 405-408

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[in Japanese]
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© The Vacuum Society of Japan
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