Abstract
The effect of topography of SiO films deposited obliquely was examined. Arrayed columnar structures were detected for films deposited at angles greater than 80°. And the pretilt angle θ of liquid crystal molecules on the surface of these films was determined to be about 40 °from the measurement performed for the ordinary pretilted cell using the magneto-capacitance null method. An abrupt change in θ was newly observed for films thicker than 500Å.θ was found to decrease gradually with increasing the substrate temperature from r.t. to 300°C. The voltage and angle-of-deposition dependences of transmittance and capacitance of a nematic liquid crystal cell are also presented.
