Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Chemical Conversion of Surface and Film Formation Techniques Used Together with Vacuum Deposition and Ion Implantation
Mamoru SATOUFuminori FUJIMOTO
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1983 Volume 26 Issue 4 Pages 287-293

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© The Vacuum Society of Japan
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