抄録
Preparation and electrochromic properties of sputtered iridium oxide films (SIROF's) were investigated to find the optimum deposition conditions. It was found that electrochromic properties and stabilities of SIROF's strongly depend on oxygen pressure and deposition rate. The optical efficiency as high as 20 cm2/C was attained with the deposition rate of 5-10Å/min and the oxygen pressure of 35 mTorr The obtained films showed stable color changes in 0.5M H2SO4 electrolyte. In order to get the contrast change of 3 (Δ OD =0.47), the required charge density was 25 mC/cm2 at the oxide thickness of 700Å with the response time less than 100 msec in both coloring and bleaching processes.
