Formation and Wear Resistant of Hafnium Carbide Film by Low Pressure Chemical Vapor Deposition

Abstract

Hafnium carbide films were formed on cemented carbide tools by low pressure chemical vapor deposition. The physical and mechanical properties of the films were investigated and the films were found to show good adhesion and no porosity. Vickers hardness, lattice parameter and carbon content of the films were as same as those for hafnium with stoichiometric composition.
The wear resistance of hafnium carbide coated tools was compared with that of titanium coated carbide tools. The mean flank wear, end flank wear, and crater wear of the hafnium coated tools were smaller than those of titanium coated toos, however grooving wear was larger. The poor grooving wear resulted from oxidation of hafnium in the cutting test.