Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Low Temperature Plasmas and Engineering (II)
On Application of Low Temperature Plasma to Electronics
Ryohei ITATANI
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1985 Volume 28 Issue 4 Pages 157-167

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© The Vacuum Society of Japan
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