Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Low Tempetature Plasmas and Engineering (III)
From the Industrial Standpoint
Osami OKADA
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JOURNAL FREE ACCESS

1985 Volume 28 Issue 4 Pages 168-176

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© The Vacuum Society of Japan
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