Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Improvements of the ARUPS System and its Application for Study of Metal Thin Film
Kazunobu NAIMasato HAYASHIToshio URANOToru KANAJIFuminori FUJIMOTO
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1985 Volume 28 Issue 5 Pages 279-281

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© The Vacuum Society of Japan
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