Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Observation of a-SiC: H Films by XPS
Goro SHIMAOKAYoshiko SUZUKINobuo SAITO
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1985 Volume 28 Issue 5 Pages 282-285

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© The Vacuum Society of Japan
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