Abstract
Cubic boron nitride (c-BN) films have been prepared by ionized deposition from evaporated boron and nitrogen gas at a pressure of 10-1 Pa. The film structures were examined by transmission electron microscopy and electeon diffraction. It was found that the structure of BN films could be classified into the following types : amorphous, hexagonal, cubic, and their mixtures. The average grain size of c-BN films was estimated to be less than few thousand angstroms. These structures and grain sizes depended mainly on the deposition conditions such as substrate potential, temperature, and ion current density.
