Vacuum Property of Aluminum Alloy MBE Chamber

Abstract

A molecular beam epitaxy (MBE) chamber has been constructed with aluminum alloy featuring an ethanol lathing in its inner surface treatment. It showed a remarkable low outgassing rate which is less than 10^-13 torr l/s cm² after a 100°C, 45 hour bakeout. Reflecting this, the chamber can be pumped down to the order of 10^-10 torr in 20 hours without bakeout and in 6 hours with bakeout. From these excellent vacuum performance, aluminum alloy UHV can claim to be a key technology for the industrialization of MBE.