Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Analysis of the Change in an Offset Pressure just after Starting the Operation of a Spinning Rotor Gauge
Hideaki ISOGAIMasahiro HIRATAMasatoshi ONOKiyohide KOKUBUN
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JOURNAL FREE ACCESS

1987 Volume 30 Issue 10 Pages 799-805

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Abstract
Just after starting the operation of a spinning rotor gauge at pressure less than 2 × 10-6 Pa (nitrogen equivalent), its offset pressure changed by 3 × 10-5 Pa from its final value. A simulation using a personal computer, based on a heat exchange by radiation between a rotor and a rotor tube of the gauge, is carried out to reveal the change in the offset pressure. The result of the simulation showed a good agreement with the time chart of the offset pressure measured experimentally. Influence of parameters, such as linear expansion coefficient, density, specific heat, emissivity of the rotor etc., on the time variation is also studied by the simulation.
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© The Vacuum Society of Japan
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