Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Zr-C Thin Films Prepared by Reactive RF Magnetron Sputtering
Masaaki YOSHITAKE, Souichi OGAWA, Katsumi TAKIGUCHI, Kazuhiro NISHIKAWA
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1989 Volume 32 Issue 3 Pages 323-326

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