Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Preparation and Properties of Co-sputtered Amorphous SixCyAlz : H Films
Yugo TOMIOKA, Nobuo SAITO, Tomuo YAMAGUCHI, Yoichiro NAKANISHI, Kazuhiko KAWAMURA
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1989 Volume 32 Issue 3 Pages 327-330

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