Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
ITO Thin Films Prepared by DC Magnetron Sputtering Method Using ITO Target
Preparation of ITO Films on Low Temperature Glass Substrate
Yoshiyuki TSUDAHideaki YASUIHidenobu SINTAKUHiroyoshi TANAKAMasahide YOKOYAMA
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1989 Volume 32 Issue 3 Pages 336-340

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© The Vacuum Society of Japan
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