Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Annealing Effects of Conductivity for a-Si1-xCx : H Films Prepared by R.F. Glow Discharge Decomposition
Isamu NAKAAKI, Nobuo SAITO, Norihiko TANAKA, Kazutosi YOSIDA
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1990 Volume 33 Issue 3 Pages 128-131

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