Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Development of a Electron-Beam Evaporator for Four-Source Simultaneous Deposition
Hisashi YAMAMOTOMasahiko KOBAYASHINobuharu OHSAKO
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1991 Volume 34 Issue 7 Pages 593-595

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© The Vacuum Society of Japan
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