Formation condition and electrical properties of sputtered SrTiO
3 insulator films for electroluminesent devices (ELD) were investigated.
It was found that high substrate temperature and Ar+He+O
2 mixed sputtering gas are suitable to obtain high breakdown voltage and large dielectric constant of SrTiO
3 films. The breakdown voltage was found to be enhanced in (111) -oriented films as well as films in with a high ion intensity ratio of Sr/Sr+Ti.
View full abstract