Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Preparation of Zirconium Nitride Thin Films by Dynamic Mixing
Masato KOBAYASHI, Yukio YOSHINO, Tohru KASANAMI
Author information
JOURNAL FREE ACCESS

1992 Volume 35 Issue 3 Pages 114-116

Details
Download PDF (305K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© The Vacuum Society of Japan
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top