Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Surface Nitriding of Aluminium by ECR Plasma
Ichiro FUJITATomoaki HINOToshiro YAMASHINA
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1992 Volume 35 Issue 3 Pages 117-120

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© The Vacuum Society of Japan
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