Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Preparation of TiC/Hard Carbon double layer Films by Plasma CVD Method
Shingo KAWAMURA, Minoru YAMADA, Yoshimasa YAGI
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1992 Volume 35 Issue 3 Pages 121-123

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