Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Structure of Carbon Excess TiCx Films by Magnetron Sputtering
Okio NISHIMURAKatsumasa YABE
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1992 Volume 35 Issue 3 Pages 224-227

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© The Vacuum Society of Japan
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