Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Preparation and Properties of In-doped Amorphous SiC : H Films by Co-sputtering
Yasuhiko INUI, Nobuo SAITO, Tomuo YAMAGUCHI
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1992 Volume 35 Issue 3 Pages 228-230

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