Abstract
A system of in-situ observation during ion irradiation and implantation was constructed by combining a 100 kV electron microscope with a 10 kV ion irradiation equipment. The equipment was designed to obtain a strong ion beam by using a duoplasmatron-type ion gun, an accelerator, two lenses and a selecting magnet. Inside the specimen chamber of the electron microscope, the beam was deflected downwards by an angle of 72° by an electrostatic prism and implanted into the surface of specimen. The ion current density attainable at the specimen position was about 1 A/m2 for the case of 10 kV helium ions, which corresponds to the flux of about of 6×1018ions/m2 s. By using this system, we have succeeded in observing, for the first time, the dynamic processes of bubble growth, coalescence and burst occurring repeatedly in a specimen.
